Tabletop Scanning Electron Microscope

This instrument is a tabletop scanning electron microscope (SEM). Observation of samples is possible from low magnification up to 100,000x. This SEM has a high vacuum mode for observation/analysis of conductive samples and a low vacuum mode for observation/analysis of insulator samples without pretreatment. Elemental analysis is also possible by energy dispersive X-ray spectroscopy (EDS) using characteristic X-rays generated during electron beam irradiation.
Copyright © Osaka University, All rights reserved.